Tailoring of surface properties by removal and deposition with laser radiation
- 1 February 1995
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 86 (1-4) , 266-277
- https://doi.org/10.1016/0169-4332(94)00396-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Description of Transfer and Deposition during PLD of Thin Ceramic Films.ISIJ International, 1994
- Process and advantage of multicomponent and multilayer PVD coatingsSurface and Coatings Technology, 1993
- Economics of semi-conductor productionMicroelectronics Journal, 1992
- Current problems in process controlIEEE Control Systems Magazine, 1987
- Nonreciprocal laser-microchemical processing: Spatial resolution limits and demonstration of 0.2-μm linewidthsApplied Physics Letters, 1984
- Laser-induced gas-surface interactionsSurface Science Reports, 1983