Design considerations for the X-ray lithography station at the Stanford synchrotron radiation laboratory
- 15 May 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 222 (1-2) , 355-358
- https://doi.org/10.1016/0167-5087(84)90558-1
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- New monochromator designs for the soft x-ray rangeNuclear Instruments and Methods in Physics Research, 1982
- Soft X-ray microscopy/lithography branch line at SSRLNuclear Instruments and Methods, 1980