Monte Carlo simulations of electron distributions in the sheath region of reactive-ion-etching plasmas
- 15 February 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (4) , 1634-1643
- https://doi.org/10.1063/1.353197
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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