The mechanical properties of thin alumina films deposited by metal-organic chemical vapour deposition
- 1 January 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 254 (1-2) , 153-163
- https://doi.org/10.1016/0040-6090(94)06241-c
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- The use of depth-sensing submicron indentation testing to characterize the mechanical behavior of thin oxide scalesScripta Metallurgica et Materialia, 1991
- Adhesion testing by the scratch test method: The influence of intrinsic and extrinsic parameters on the critical loadThin Solid Films, 1987
- The mechanical properties of wear-resistant coatingsThin Solid Films, 1987
- The mechanical properties of wear-resistant coatingsThin Solid Films, 1987
- Microhardness Measurement as a Quality Control Technique for Thin, Hard CoatingsSurface Engineering, 1987
- A method for interpreting the data from depth-sensing indentation instrumentsJournal of Materials Research, 1986
- Hardness measurements of thin filmsThin Solid Films, 1984
- Surface softening in silicon by ion implantationJournal of Materials Science, 1984
- Scratch adhesion testing of hard coatingsThin Solid Films, 1983