Characterization of TiNi shape-memory alloy thin films for MEMS applications
- 1 August 2001
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 145 (1-3) , 107-112
- https://doi.org/10.1016/s0257-8972(01)01324-x
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
- An overview of nitinol medical applicationsPublished by Elsevier ,1999
- Low temperature crystallised Ti-rich NiTi shape memory alloy films for microactuatorsSensors and Actuators A: Physical, 1999
- The TiNi shape-memory alloy and its applications for MEMSJournal of Micromechanics and Microengineering, 1998
- Thin-film shape-memory alloy actuated micropumpsJournal of Microelectromechanical Systems, 1998
- Shape-memory materials and hybrid composites for smart systems: Part I Shape-memory materialsJournal of Materials Science, 1998
- Thin film shape memory alloy microactuatorsJournal of Microelectromechanical Systems, 1996
- Sputter deposition of TiNi, TiNiPd and TiPd films displaying the two-way shape-memory effectSensors and Actuators A: Physical, 1996
- An Attractive No-man’s-land, Intermetallic CompoundsMaterials Transactions, JIM, 1996
- TiNi (shape memory) films silicon for MEMS applicationsJournal of Microelectromechanical Systems, 1995
- Thin-film processing of TiNi shape memory alloySensors and Actuators A: Physical, 1990