Low temperature crystallised Ti-rich NiTi shape memory alloy films for microactuators
- 1 April 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 74 (1-3) , 65-69
- https://doi.org/10.1016/s0924-4247(98)00304-5
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Thin film shape memory alloy microactuatorsJournal of Microelectromechanical Systems, 1996
- Formation of nanocrystals with an identical orientation in sputter-deposited Ti Ni thin filmsPhilosophical Magazine Letters, 1996
- NiTi shape memory alloy thin films: composition control using optical emission spectroscopyThin Solid Films, 1996
- High-temperature sputtered amorphous GaAsJournal of Non-Crystalline Solids, 1995
- Transformations in sputter-deposited thin films of NiTi shape memory alloyMaterials Letters, 1995
- Dynamics of Thin Film NiTi Cantilevers on SiMRS Proceedings, 1993
- Oriented nickel-titanium shape memory alloy films prepared by annealing during depositionApplied Physics Letters, 1992
- Residual Stress, Adhesion and Crystallization of Ion-Sputtered and Ibed Processed NiTi FilmsMRS Proceedings, 1991
- Shape-memory properties in Ni-Ti sputter-deposited filmJournal of Applied Physics, 1990