Abstract
The passivation of a bulk donor defect (Ec –0.36 eV) in polycrystalline GaAs by reaction with atomic hydrogen has been observed using deep level transient spectroscopy. The concentration profile of the defect is presented as a function of the duration and temperature of the exposure to atomic hydrogen—when exposed for 3 h at 250 °C, 3×1015 donor defects cm−3 were passivated to a depth of ∼1.1 μm.