THE DOUBLE BEND FILTERED CATHODIC ARC TECHNOLOGY AND ITS APPLICATIONS

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Abstract
A new Filtered Cathodic Vacuum Arc coating system with a magnetic macroparticle filter design consisting of an off-plane double-bend (OPDB) filter is described. The transport of the vacuum arc plasma through this OPDB filter is investigated using Langmuir and deposition probes. Films of amorphous hard carbon have been deposited a 90° single bend and the OPDB filter and the macroparticle contents of the films are compared. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model. The results demonstrate the OPDB filter has a relatively better transmission efficiency than the 90° single bend filter, lower macroparticle counts and is suitable for preparation of diamond-like carbon coatings with high quality. Some important applications of the ta-C coating produced by using the new FCVA system have been identified and where applicable industrial testing results are presented.

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