Low-temperature direct bonding of silicon and silicon dioxide by the surface activation method
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2) , 164-170
- https://doi.org/10.1016/s0924-4247(98)00128-9
Abstract
No abstract availableKeywords
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