High resolution scanning electron microscopy

Publisher Website
Google Scholar
Abstract
A scanning electron microscope using three magnetic electron lenses and a thermionic electron source has been developed to give an electron probe size of 50 Å and a resolution in reflection of 100 Å. This experimental result agrees with the theoretical limit on electron probe size and current found by consideration of the aberrations of the lens, electron noise and contrast levels in the final picture. Results are shown in both transmission and reflection at magnifications up to 130 000 ×.

This publication has 6 references indexed in Scilit: