Contribution of Backscattered Electrons to Secondary Electron Formation

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Abstract
It is shown experimentally that backscattered electrons emitted from solids under electron bombardment contribute significantly to the observed secondary yield, even for the case of low backscattering coefficients. Thus, it was found that in Al with a backscattering coefficient of only 0.14, about 40% of all secondaries are produced by backscattered electrons for initial energies from several kev to several tens of kev. The large contribution of backscattered electrons to secondary formation even for materials of low atomic number agrees approximately with what one would expect from the larger rate of energy loss and the greater path lengths of the backscattered electrons in the secondary electron escape region compared to that of the incoming primaries.