Detection of Ultrathin SiC Layers by Infrared Spectroscopy. Simulation and Experiment
- 16 October 1994
- journal article
- thin film-properties
- Published by Wiley in Physica Status Solidi (a)
- Vol. 145 (2) , 369-377
- https://doi.org/10.1002/pssa.2211450217
Abstract
No abstract availableKeywords
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