1×2 MOEMS switch based on silicon-on-insulator and polymeric waveguides
- 14 February 2002
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 38 (4) , 177-178
- https://doi.org/10.1049/el:20020110
Abstract
A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 µs. A crosstalk of −32 dB has been measured.Keywords
This publication has 5 references indexed in Scilit:
- Silica-based 8×8 optical matrix switch integrating new switching units with large fabrication toleranceJournal of Lightwave Technology, 1999
- Free-space fiber-optic switches based on MEMS vertical torsion mirrorsJournal of Lightwave Technology, 1999
- Digital optical switch based on ‘oversized’polymer rib waveguidesElectronics Letters, 1996
- Wavelength- and polarization-independent large angle InP/lnGaAsP digital optical switches with extinction ratios exceeding 20 dBIEEE Photonics Technology Letters, 1994
- Low-crosstalk 2×2 digital optical switchElectronics Letters, 1994