Microprocessor-controlled laser scanning system for annealing of semiconductors
- 31 October 1981
- journal article
- Published by Elsevier in Optics & Laser Technology
- Vol. 13 (5) , 265-269
- https://doi.org/10.1016/0030-3992(81)90053-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Laser pulse annealing of ion-implanted GaAsJournal of Applied Physics, 1980
- A melting model for pulsing-laser annealing of implanted semiconductorsJournal of Applied Physics, 1979
- Laser Annealing: Processing Semiconductors Without a FurnaceScience, 1978
- A laser-scanning apparatus for annealing of ion-implantation damage in semiconductorsApplied Physics Letters, 1978