Titanium carbide thin films obtained by reactive magnetron sputtering
- 3 October 1986
- Vol. 36 (10) , 595-597
- https://doi.org/10.1016/0042-207x(86)90327-1
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Properties of TixC1 − x films coated on molybdenum by magnetron sputteringThin Solid Films, 1983
- Influence of substrate bias on composition and structure of reactively r.f.-sputtered TiC filmsThin Solid Films, 1981