Levitation of a micromachined rotor forapplication in a rotating gyroscope
- 12 October 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (21) , 1845-1846
- https://doi.org/10.1049/el:19951232
Abstract
The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400 µm diameter, 12 µm thick rotor is levitated to a height of 30 µm.Keywords
This publication has 2 references indexed in Scilit:
- Magnetic and magnetoelastic properties of amorphous Fe-Si-B-C filmsIEEE Transactions on Magnetics, 1994
- A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic coreJournal of Microelectromechanical Systems, 1993