A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core
- 1 March 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 2 (1) , 15-22
- https://doi.org/10.1109/84.232590
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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