Dynamical theory of diffraction at in-depth multilayered gratings

Abstract
The diffraction of an electromagnetic plane wave at an in-depth multilayered grating is considered in the framework of dynamical theory. The grating consists of a stack of slabs whose dielectric constants vary laterally in a periodic manner. All the slabs are homogeneous in-depth and have the same lateral periodicity. The two polarization cases (TE and TM modes) are treated. Numerical results are given in the X-ray regime for lamellar gratings obtained by engraving multilayer Bragg mirrors.

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