Soft-x-ray multilayer gratings with subhalfmicron period
- 1 April 1990
- journal article
- Published by Elsevier in Optics Communications
- Vol. 76 (2) , 111-115
- https://doi.org/10.1016/0030-4018(90)90303-b
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Combined microstructure x-ray opticsReview of Scientific Instruments, 1989
- Soft x-ray W/Be multilayer and its application to a diffraction grating Yuichi,UtsumiReview of Scientific Instruments, 1989
- Applications of microfabrication technology to x-ray laser cavitiesJournal of Vacuum Science & Technology B, 1988
- X-UV synthetic interference mirrors : theoretical approachRevue de Physique Appliquée, 1988
- Multilayers For X-Ray OpticsOptical Engineering, 1986
- Versatile X-UV spectrogoniometer with multilayer interference mirrorsReview of Scientific Instruments, 1985
- Fabry-Perot etalons for x-rays: Construction and characterizationOptics Communications, 1984