Optimization of a two-stages electrostatic reflex ion source
- 1 April 1994
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (4) , 1101-1103
- https://doi.org/10.1063/1.1145077
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Study of a microwave plasma cathodeReview of Scientific Instruments, 1992
- An ECR microwave plasma cathode for ion sources with electrostatic reflex containmentReview of Scientific Instruments, 1992
- Microwave discharge theory for the microwave ion sourceReview of Scientific Instruments, 1992
- Development of microwave plasma cathode for ion sourcesReview of Scientific Instruments, 1990
- Antenna impedance measurements and sheath effects in an RF generated plasmaIEEE Transactions on Antennas and Propagation, 1971