Microwave discharge theory for the microwave ion source
- 1 April 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (4) , 2601-2603
- https://doi.org/10.1063/1.1143825
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Development of microwave plasma cathode for ion sourcesReview of Scientific Instruments, 1990
- Emittances of a microwave ion source for implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Slit extraction type compact microwave ion sourceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- A microwave ion source and injector system for a Van de Graaff acceleratorNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988
- Axial magnetic field extraction-type microwave ion source with a permanent magnetReview of Scientific Instruments, 1984
- High-current ion implanter using a microwave ion sourceReview of Scientific Instruments, 1983
- Published by CSIRO Publishing ,1957
- The Effect of Magnetic Field on the Breakdown of Gases at Microwave FrequenciesJournal of Applied Physics, 1950
- XXVI.Generalization of the theory of electrical dischargesJournal of Computers in Education, 1938