Optical properties of d.c. reactively sputtered thin films
- 1 October 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 120 (2) , 81-108
- https://doi.org/10.1016/0040-6090(84)90364-x
Abstract
No abstract availableKeywords
This publication has 47 references indexed in Scilit:
- Composition, optical properties and degradation modes of Cu/(graded metal-carbon) solar selective surfacesThin Solid Films, 1983
- A high rate sputtering process for the formation of hard friction-reducing TiN coatings on toolsThin Solid Films, 1982
- Evacuation and deterioration of all-glass tubular solar thermal collectorsSolar Energy Materials, 1982
- Color of titanium nitride prepared by reactive dc magnetron sputteringJournal of Vacuum Science and Technology, 1982
- Apparatus surface conditioning effects in copper sulfide reactive sputtering for photovoltaic applicationsJournal of Vacuum Science and Technology, 1982
- Deposition of A1N thin films by magnetron reactive sputteringThin Solid Films, 1981
- Cylindrical magnetron sputtering system for coating solar selective surfaces onto batches of tubesJournal of Vacuum Science and Technology, 1979
- Sputtered metal carbide and metal silicide solar absorbing surfacesThin Solid Films, 1979
- Applications of thin graded-index films to solar absorbersApplied Optics, 1977
- Reflection and Transmission Interference Filters Part I TheoryJournal of the Optical Society of America, 1947