Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist
- 1 July 2004
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 234 (1-4) , 102-106
- https://doi.org/10.1016/j.apsusc.2004.05.033
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology
- Promotion and Mutual Aid Corporation for Private Schools of Japan
This publication has 10 references indexed in Scilit:
- Regulation of the Surface Potential of Silicon Substrates in Micrometer Scale with Organosilane Self-Assembled MonolayersLangmuir, 2002
- Highly Selective Protein Patterning on Gold−Silicon Substrates for Biosensor ApplicationsLangmuir, 2002
- Amino-terminated self-assembled monolayer on a SiO2 surface formed by chemical vapor depositionJournal of Vacuum Science & Technology A, 2001
- Chip-Based Optical Detection of DNA Hybridization by Means of Nanobead LabelingAnalytical Chemistry, 2000
- Micropatterning of Alkyl- and Fluoroalkylsilane Self-Assembled Monolayers Using Vacuum Ultraviolet LightLangmuir, 2000
- Octadecyltrichlorosilane self-assembled-monolayer islands as a self-patterned-mask for HF etching of SiO2 on SiJournal of Vacuum Science & Technology A, 1998
- Simultaneous Observation of SiO2 Surface and SiO2/Si Interface Using Self-Assembled-Monolayer IslandJapanese Journal of Applied Physics, 1998
- DNA SEQUENCING: Massively Parallel GenomicsScience, 1997
- Self-assembled-monolayer film islands as a self-patterned-mask for SiO2 thickness measurement with atomic force microscopyApplied Physics Letters, 1997
- Improved electron-beam patterning of Si with self-assembled monolayersApplied Physics Letters, 1996