Simulating the behavior of MEMS devices: computational methods and needs
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Computational Science and Engineering
- Vol. 4 (1) , 30-43
- https://doi.org/10.1109/99.590854
Abstract
Technologies for fabricating a variety of MEMS devices have developed rapidly, but computational tools that allow engineers to quickly design and optimize these micromachines have not kept pace. Inadequate simulation tools force MEMS designers to resort to physical prototyping. To realistically simulate the behavior of complete micromachines, algorithmic innovation is necessary in several areas.Keywords
This publication has 40 references indexed in Scilit:
- M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structuresJournal of Microelectromechanical Systems, 1997
- A spectral boundary element approach to three-dimensional Stokes flowJournal of Fluid Mechanics, 1995
- A computer-aided design system for microelectromechanical systems (MEMCAD)Journal of Microelectromechanical Systems, 1992
- Multilevel computations of integral transforms and particle interactions with oscillatory kernelsComputer Physics Communications, 1991
- Fast wavelet transforms and numerical algorithms ICommunications on Pure and Applied Mathematics, 1991
- FastCap: a multipole accelerated 3-D capacitance extraction programIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1991
- A hierarchical O(N log N) force-calculation algorithmNature, 1986
- Rapid solution of integral equations of classical potential theoryJournal of Computational Physics, 1985
- Calculation of High-Resolution SAR Distributions in Biological Bodies Using the FFT Algorithm and Conjugate Gradient Method (Short Papers)IEEE Transactions on Microwave Theory and Techniques, 1985
- Accurate numerical integration of singular boundary element kernels over boundaries with curvatureInternational Journal for Numerical Methods in Engineering, 1985