The growth kinetics and properties of hard and insulating carbonaceous films grown in an r.f. discharge
- 1 June 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 60 (2) , 213-225
- https://doi.org/10.1016/0040-6090(79)90191-3
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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- Some characteristics of hard carbonaceous filmsThin Solid Films, 1977
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- Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasmaThin Solid Films, 1976
- Ion-beam-deposited polycrystalline diamondlike filmsApplied Physics Letters, 1976
- The deposition of hard surface layers by hydrocarbon cracking in a glow dischargeThin Solid Films, 1976
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971