Dry etching of gratings on spin-coated As2S3 films
- 1 June 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 116 (1-3) , L53-L54
- https://doi.org/10.1016/0040-6090(84)90453-x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Spin coated amorphous chalcogenide films: Thermal propertiesJournal of Applied Physics, 1983
- Spin coated amorphous chalcogenide films: Structural characterizationJournal of Applied Physics, 1983
- Spin-coated amorphous chalcogenide filmsJournal of Applied Physics, 1982
- Amorphous As2 S3 thin film waveguide with grating couplerOptical and Quantum Electronics, 1980
- A dry-etched inorganic resistApplied Physics Letters, 1978