Two-dimensional micromechanical bimorph arrays for detection of thermal radiation

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Abstract
We demonstrate that two-dimensional arrays of micromechanical bimorphs can be used as thermal sensors to image infrared (IR) radiation. A density of 100 pixels per mm2 is achieved by coiling a bimorph beam into the shape of a flat spiral. Temperature variations of a given spiral are converted to modulations of visible light by illuminating the spiral array with a visible source. The optical properties of the spiral resemble a Fresnel zone plate when light reflected off neighboring rings of the spiral is focused. When a spiral is heated through the absorption of IR radiation, thermally induced bending of the bimorph degrades the focusing efficiency by distorting the spiral. This reduces the optical intensity at the focal point. Arrays of spirals can be monitored with a commercial CCD camera. At 40 Hz, the temperature resolution and noise equivalent power of a 75 μm diam spiral are 50 μK/√Hz and 20 nW/√Hz, respectively, and the thermal response time is 270 μs.