An improved gas puff design for a Z-pinch x-ray source
- 1 May 1990
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (5) , 1457-1459
- https://doi.org/10.1063/1.1141151
Abstract
An analysis of the magnetically induced, compression gas puff has led to a new design which greatly enhances the performance of the Z‐pinch, soft x‐ray source incorporating this concept. It is shown that the improved gas puff design has resolved the problems related to the nonuniformity of the annular slit opening in the gas puff nozzle and to the poor coupling of the induction coil current with the gas in the nozzle plenum. Suggestions are made to further improve the design in order to reduce nozzle erosion due to arcing from the high‐current Z‐pinch discharge.Keywords
This publication has 10 references indexed in Scilit:
- Solenoid gas puff imploding liner x-ray sourceJournal of Applied Physics, 1989
- Submillimeter high brightness pulsed x-ray sourceApplied Physics Letters, 1988
- Characteristics Of A Gas-Puff Z-Pinch Plasma X-Ray SourcePublished by SPIE-Intl Soc Optical Eng ,1986
- A plasma x-ray source for x-ray lithographyJournal of Vacuum Science & Technology B, 1986
- Bright Discharge Plasma Sources For X-Ray LithographyPublished by SPIE-Intl Soc Optical Eng ,1985
- Experimental characterization of a puff-gas z-pinch plasma prior to implosionApplied Physics Letters, 1985
- Supersonic gas shell for puff pinch experimentsApplied Physics Letters, 1982
- X-ray lithography using a pulsed plasma sourceJournal of Vacuum Science and Technology, 1981
- Imploding argon plasma experimentsApplied Physics Letters, 1979
- Pinch of a Gas JetPhysical Review Letters, 1978