Silicon-on-Insulator Based 2×2 Multimode Interference Coupler with Large Tolerance
- 1 February 2001
- journal article
- Published by IOP Publishing in Chinese Physics Letters
- Vol. 18 (2) , 245-247
- https://doi.org/10.1088/0256-307x/18/2/331
Abstract
We demonstrate a type of 2×2 multimode interference 3 dB coupler based on silicon-on-insulator. The fabrication tolerance was investigated by the effective index method and the guide mode method. The devices with different lengths were fabricated and near-field output images were obtained. Tolerances to width, length and etch depth are 2, 200 and 2 µm, respectively. The devices show a uniform power distribution.Keywords
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