Determination of composition and thickness of TiNxOy films on silicon by combined x-ray and nuclear microanalysis
- 1 January 1983
- journal article
- research article
- Published by Wiley in X-Ray Spectrometry
- Vol. 12 (1) , 38-41
- https://doi.org/10.1002/xrs.1300120109
Abstract
No abstract availableKeywords
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