Universal Mechanism for Gas Adsorption and Electron Trapping on Oxidized Silicon

Abstract
We report that common gases (such as He, Ar, H2, O2, N2, CO) experience adsorption at oxidized silicon surfaces at 300 K via electrostatic coupling. This is deduced using contact potential measurements of the work function for gas pressure in the range 103<P<102Torr. The adsorption can be enhanced through surface charging via internal photoemission of electrons leading to mutual electron-gas transient trapping. A simple electrostatic model based on monopole-dipole coupling results in an isotherm in agreement with the data.