Universal Mechanism for Gas Adsorption and Electron Trapping on Oxidized Silicon
- 11 January 1999
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 82 (2) , 359-361
- https://doi.org/10.1103/physrevlett.82.359
Abstract
We report that common gases (such as He, Ar, , , , CO) experience adsorption at oxidized silicon surfaces at 300 K via electrostatic coupling. This is deduced using contact potential measurements of the work function for gas pressure in the range . The adsorption can be enhanced through surface charging via internal photoemission of electrons leading to mutual electron-gas transient trapping. A simple electrostatic model based on monopole-dipole coupling results in an isotherm in agreement with the data.
Keywords
This publication has 9 references indexed in Scilit:
- Electron Photoinjection from Silicon to Ultrathin SiFilms via Ambient OxygenPhysical Review Letters, 1996
- Oxide surfacesReports on Progress in Physics, 1996
- Initial oxidation of silicon (100): A unified chemical model for thin and thick oxide growth rates and interfacial structureJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Physics and chemistry in high electric fieldsPhilosophical Magazine Part B, 1994
- Modern Techniques of Surface SciencePublished by Cambridge University Press (CUP) ,1994
- Ultraviolet laser-induced oxidation of silicon: The effect of oxygen photodissociation upon oxide growth kineticsJournal of Applied Physics, 1988
- Ultraviolet bleaching and regeneration of ⋅Si≡Si3 centers at the Si/SiO2 interface of thinly oxidized silicon wafersJournal of Applied Physics, 1982
- Direct and Indirect Excitation Processes in Photoelectric Emission from SiliconPhysical Review B, 1962
- Theory of Photoelectric Emission from SemiconductorsPhysical Review B, 1962