Means of obtaining uniform sputtering in an ion microprobe
- 1 September 1972
- journal article
- other
- Published by Elsevier in Surface Science
- Vol. 32 (3) , 743-747
- https://doi.org/10.1016/0039-6028(72)90201-4
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Improved ``Tuning'' of Ion Microprobes Using Scandium Thin Film TargetsReview of Scientific Instruments, 1972
- Design of a combined ion and electron microprobe apparatusInternational Journal of Mass Spectrometry and Ion Physics, 1971
- Analysis of surfaces utilizing sputter ion source instrumentsSurface Science, 1971
- Analysis of thin films by ion microprobe mass spectrometryAnalytical Chemistry, 1970