Application of oxidation to the structural characterization of SiC epitaxial films
- 8 July 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (2) , 183-185
- https://doi.org/10.1063/1.105960
Abstract
Both 3C-SiC and 6H-SiC single-crystal films can be grown on vicinal (0001) 6H-SiC wafers. We have found that oxidation can be a powerful diagnostic process for (1) ‘‘color mapping’’ the 3C and 6H regions of these films, (2) decorating stacking faults in the films, (3) enhancing the decoration of double positioning boundaries, and (4) decorating polishing damage. Contrary to previously published oxidation results, proper oxidation conditions can yield interference colors that provide a definitive map of the polytype distribution for both the Si face and C face of SiC films. Defects were more effectively decorated by oxidation on the Si face than on the C face.Keywords
This publication has 9 references indexed in Scilit:
- Growth of high quality 6H-SiC epitaxial films on vicinal (0001) 6H-SiC wafersApplied Physics Letters, 1990
- Growth of improved quality 3C-SiC films on 6H-SiC substratesApplied Physics Letters, 1990
- Growth rate, surface morphology, and defect microstructures of β–SiC films chemically vapor deposited on 6H–SiC substratesJournal of Materials Research, 1989
- Chemical vapor deposition and characterization of 6H-SiC thin films on off-axis 6H-SiC substratesJournal of Applied Physics, 1988
- High-temperature depletion-mode metal-oxide-semiconductor field-effect transistors in beta-SiC thin filmsApplied Physics Letters, 1987
- Fabrication of P-N Junction Diodes Using Homoepitaxially Grown 6H-SiC at Low Temperature by Chemical Vapor DepositionJapanese Journal of Applied Physics, 1987
- Epitaxial growth of β-SiC thin films on 6H α-SiC substrates via chemical vapor depositionApplied Physics Letters, 1986
- Thermal Oxidation and Electrolytic Etching of Silicon CarbideJournal of the Electrochemical Society, 1975
- Nondestructive Determination of Thickness and Refractive Index of Transparent FilmsIBM Journal of Research and Development, 1964