Mechanical properties of SiO 2 and Si 3 N 4 coatings: a BAM/NIST co-operative project
- 1 November 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 332 (1-2) , 164-171
- https://doi.org/10.1016/s0040-6090(98)00989-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Multilayer reference coatings for depth profile standardsThin Solid Films, 1996
- Determination of elastic modulus and thickness of surface layers by ultrasonic surface wavesThin Solid Films, 1992
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992