Multilayer reference coatings for depth profile standards
- 1 December 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 290-291, 57-62
- https://doi.org/10.1016/s0040-6090(96)09083-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Dielectric reference coatings for the evaluation of thin film characterization techniquesThin Solid Films, 1995
- Comparison of depth resolution for direct current and radiofrequency modes in glow discharge optical emission spectrometryJournal of Analytical Atomic Spectrometry, 1995
- Contributions to computer-aided interpretation of ion sputtering depth profilingSpectrochimica Acta Part B: Atomic Spectroscopy, 1994
- Application of glow discharge optical emission spectroscopy (GDOES) to the analysis of PVD- and CVD-layersAnalytical and Bioanalytical Chemistry, 1993