Kikuchi correlations in Auger electron spectroscopy
- 1 October 1973
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 23 (7) , 359-360
- https://doi.org/10.1063/1.1654918
Abstract
Variations in Auger electron signal intensities with changing primary electron angle of incidence have been correlated with the Kikuchi display from a Si (111) surface. From this correlation a qualitative depth distribution of the carbon contaminant is inferred.Keywords
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