Gasphasenabscheidung im system Silicium-Kohlenstoff
- 30 November 1971
- journal article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 25 (3) , 303-315
- https://doi.org/10.1016/0022-5088(71)90154-8
Abstract
No abstract availableKeywords
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- The Epitaxial Growth of Silicon CarbideJournal of the Electrochemical Society, 1966
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