Properties of ECR Plasma in a Simple Mirror Field I–Correlation in Cold and Hot Electron Production–
- 1 December 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (12R)
- https://doi.org/10.1143/jjap.26.2072
Abstract
The properties of an ECR plasma in various gas species have been clarified through soft X-ray and probe measurements. Soft X-ray measurements were performed on hot electron plasmas in the energy range of 1–15 keV and hot electron parameters were determined. Using data concerning cold plasma parameters determined from probe measurements, a close correlation was found in the production and/or heating of cold and hot electron components by changing the external parameters over a wide range.Keywords
This publication has 7 references indexed in Scilit:
- Microwave ion source for ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Experiments on whistler mode electron-cyclotron resonance plasma startup and heating in an axisymmetric magnetic mirrorPhysics of Fluids, 1985
- Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance PlasmaJapanese Journal of Applied Physics, 1983
- Electron Cyclotron Resonance Multiply Charged Ion SourcesIEEE Transactions on Nuclear Science, 1976
- Generation of energetic electrons by electron cyclotron heating in a magnetic mirror fieldNuclear Fusion, 1973
- Axial distribution for a hot electron plasmaPhysics of Fluids, 1973
- Properties of a high-beta plasma produced by electron-cyclotron heatingNuclear Fusion, 1964