A Large Area, High-Resolution a-Si:H Array for X-Ray Imaging

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Abstract
The development of a large area, high-resolution, a-Si:H x-ray imager is reported. The array has 1536×1920 pixels, a pixel pitch of 127μm, and an area of 19.5×24.4 cm2. Tne array is tailored to the high frame rate and high spatial resolution requirements of diagnostic x-ray imaging. The design of this array is presented and examples of x-ray images are illustrated. Initial Measurements of the sensor capacitance and pixel time constant properties are in good agreement with theoretical expectations. These results indicate that high-resolution arrays of this construction are capable of providing fluoroscopic images at rates of at least 30 frames per second.