Plastic micropump with ferrofluidic actuation
- 7 February 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 14 (1) , 96-102
- https://doi.org/10.1109/jmems.2004.839007
Abstract
We present the realization and characterization of a new type of plastic micropump based on the magnetic actuation of a magnetic liquid. The pump consists of two serial check-valves that convert the periodic motion of a ferrofluidic plug into a pulsed quasi-continuous flow. The ferrofluid is actuated by the mechanical motion of an external NdFeB permanent magnet. The water-based ferrofluid is synthesized in-house using a coprecipitation method and has a saturation magnetization of 32 mT. The micropump consists of various layers of polymethylmethacrylate (PMMA), which are microstructured by powder blasting or by standard mechanical micromachining techniques, and are assembled in a single plastic structure using a monomer gluing solution. Two soft silicone membranes are integrated in the microfluidic structure to form two check-valves. Water has been successfully pumped at flow rates of up to 30 /spl mu/L/min and pumping is achieved at backpressures of up to 25 mbar.Keywords
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