A new technology for fluidic microsystems based on PCB technology
- 1 October 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 77 (2) , 98-105
- https://doi.org/10.1016/s0924-4247(99)00062-x
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- A low pressure micromachined flow modulatorSensors and Actuators A: Physical, 1998
- The VAMP — a new device for handling liquids or gasesSensors and Actuators A: Physical, 1996
- A silicon thermocapacitive flow sensor with frequency modulated outputSensors and Actuators A: Physical, 1996
- Future of actuators and microsystemsSensors and Actuators A: Physical, 1996
- An invasive catheter flow sensor with on-chip CMOS readout electronics for the on-line determination of blood flowSensors and Actuators A: Physical, 1996
- A bidirectional silicon micropumpSensors and Actuators A: Physical, 1995
- Low-cost silicon sensors for mass flow measurement of liquids and gasesSensors and Actuators A: Physical, 1995
- Multi-parameter detection in fluid flowsSensors and Actuators A: Physical, 1995
- Bistable fluidic elements in LIGA technique for flow control in fluidic microactuatorsSensors and Actuators A: Physical, 1994