Time-Resolved Electron Energy Distribution Function Measurements in a Low-Frequency r.f. Glow Discharge
- 15 January 1989
- journal article
- Published by IOP Publishing in Europhysics Letters
- Vol. 8 (2) , 141-145
- https://doi.org/10.1209/0295-5075/8/2/006
Abstract
No abstract availableKeywords
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