Time-resolved plasma parameter measurements in a low-frequency rf glow discharge
- 7 March 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 52 (10) , 783-785
- https://doi.org/10.1063/1.99283
Abstract
A new approach to the use of Langmuir probes in a rf driven plasma is presented. The periodic nature of the rf is utilized to overcome the distortion of the probe characteristics caused by averaging over many rf cycles. Time-resolved measurements of the electron density, electron temperature, plasma potential, and floating potential in the negative portion of the rf cycle are obtained. The technique is used to characterize a low-pressure 100-kHz capacitively coupled rf argon discharge. The measured electron temperature is found to be approximately 0.5 eV.Keywords
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