D.c. and r.f. (reactive) magnetron sputtering of ZnO:Al films from metallic and ceramic targets: a comparative study
- 31 August 1997
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 93 (1) , 21-26
- https://doi.org/10.1016/s0257-8972(97)00031-5
Abstract
No abstract availableKeywords
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