Sputtered Thin Films for Integrated Optics
- 1 April 1974
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 13 (4) , 712-715
- https://doi.org/10.1364/ao.13.000712
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 4 references indexed in Scilit:
- Barium Silicate Films for Integrated Optical CircuitsApplied Optics, 1973
- Optical Propagation in Sheet and Pattern Generated Films of Ta_2O_5Applied Optics, 1971
- Composition and Structure of Sputtered Films of Ferroelectric NiobatesJournal of Vacuum Science and Technology, 1971
- Deposition of Tantalum and Tantalum Oxide by Superimposed RF and D -C SputteringJournal of the Electrochemical Society, 1967