Analysis of strain and mosaicity in a short-period Si9Ge6 superlattice by x-ray diffraction
- 10 January 1994
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (2) , 172-174
- https://doi.org/10.1063/1.111555
Abstract
Triple axis x‐ray diffractometry was employed for the structural characterization of a 100 period Si9Ge6 superlattice grown by molecular beam epitaxy on a thick step‐graded SiGe alloy buffer. From the distribution of diffusely scattered intensity around reciprocal lattice points the correlation function of the deformation field due to structural defects has been calculated using kinematical theory of x‐ray diffraction. From the extension of the correlation function it turns out that on the average the entire superlattice (0.2 μm thick) scatters coherently along growth direction, whereas laterally the coherently scattering regions are extended only over about 40 nm.Keywords
This publication has 15 references indexed in Scilit:
- X-ray double and triple crystal diffractometry of mosaic structure in heteroepitaxial layersJournal of Applied Physics, 1993
- Effect of compressive and tensile strain on misfit dislocation injection in SiGe epitaxial layersJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Raman scattering analysis of relaxed GexSi1−x alloy layersApplied Physics Letters, 1993
- X-ray diffractometry of small defects in layered systemsJournal of Physics D: Applied Physics, 1993
- Characterization of short-period Sim Gen superlattices by high-resolution transmission electron microscopy and X-ray diffractionThin Solid Films, 1992
- Ultrathin SimGenstrained layer superlattices-a step towards Si optoelectronicsSemiconductor Science and Technology, 1992
- Structural stability of short-period Si/Ge superlattices studied with Raman spectroscopyPhysical Review B, 1991
- Anomalous strain relaxation in SiGe thin films and superlatticesPhysical Review Letters, 1991
- Combining high-resolution X-ray diffractometry and topographyJournal of Applied Crystallography, 1991
- A high-resolution multiple-crystal multiple-reflection diffractometerJournal of Applied Crystallography, 1989