On the Backside Gettering of Au in Silicon
- 16 February 1990
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 117 (2) , 395-402
- https://doi.org/10.1002/pssa.2211170208
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- On the Shape of the Au Depth Profile in Heat Treated Si WafersPhysica Status Solidi (a), 1989
- Decoration of defects in silicon with gold, and related subjectsPhysica Status Solidi (a), 1987
- Gettering of gold in silicon: A tool for understanding the properties of silicon interstitialsJournal of Applied Physics, 1987
- U- and W-shaped diffusion profiles of gold in siliconJournal of Physics C: Solid State Physics, 1986
- Mechanism and kinetics of the diffusion of gold in siliconApplied Physics A, 1980
- Wärmeleitung und TemperaturausgleichPublished by Walter de Gruyter GmbH ,1971