New results in d.c. reactive magnetron deposition of TiNx films
- 1 December 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 167 (1-2) , 107-120
- https://doi.org/10.1016/0040-6090(88)90487-7
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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