X-ray analysis of strain in titanium nitride layers
- 1 May 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 149 (1) , 49-60
- https://doi.org/10.1016/0040-6090(87)90247-1
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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