Ion implantation effects in silicon carbide

This publication has 14 references indexed in Scilit:

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• The hardness and elastic modulus of chromium-implanted silicon carbide
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
• The structure of ion implanted ceramics
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
• Ion implantation and annealing of crystalline oxides and ceramic materials
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
• Ion implantation in β-SiC: Effect of channeling direction and critical energy for amorphization
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• Damage accumulation in ceramics during ion implantation
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
• The reactivity of ion-implanted SiC
  Materials Science and Engineering, 1985
• Structural alterations in SiC as a result of Cr+ and N+ implantation
  Nuclear Instruments and Methods in Physics Research, 1983
• Photoluminescence of Radiation Defects in Ion-Implanted6HSiC
  Physical Review B, 1972
• Disorder produced in SiC by ion bombardment
  Radiation Effects, 1971